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www.esto-el.ru / Catalog / Power supply inverters for ion sources, glow discharge, organosilicon deposition

Power supply inverters for ion sources, glow discharge, organosilicon deposition

Power supply inverters for ion sources

ELI series. 

This series is designed to supply electric power to ion sources, which are used for ion-plasma deposition and etching of thin film coatings in vacuum, for ion surface cleaning of products and for ion assisting. The units with output voltage up to 300V and capacity up to 4kW are intended for low-voltage ion sources of "End Hall" type. The units with output voltage up to 4kV and capacity up to 9kW are intended for high-voltage round and for extended ion sources of "Radical" type.

Model

Max. Output parameters

Case type:

Note:

Download

Voltage, V

Current, A

"End Hall" type:

"ELI-18/200 (-R)"

+/- 200(550)

20

19", 4HU

4 kW, neutr. (+backup) 25V, 30A, Iem/Idischarge, double-channel gas puffing control subsystem

.PDF

Universal Automated Signalization type (extended):

"ELI-0,4(0,6)/
3000(N)(-R)"

+3000

0,4(0,6)

19", 4HU

1.2 (1.8) kW, .. volt-ampere characteristic, options:
neutr., (+backup), 30V, 32A, I/I, double-channel gas puffing control subsystem

.PDF

"ELI-1,3/3000 (-R)"

+3000

1,5

19", 4HU

4 kW, . 2-stage. volt-ampere characteristic, options

"ELI-2/3000 (-R)"

+3000

2,0

19", 4HU

6 kW, . 2-stage. volt-ampere characteristic, options

"ELI-3/3000 (-R)"

+3000

3,0

19", 4HU

9 kW, . 2-stage. volt-ampere characteristic, options

Power supply inverters for ion sourcesPower supply inverters for ion sourcesPower supply inverters for ion sourcesPower supply inverters for ion sources

Power supply inverters for glow discharge

ELG series.

ELG series equipment is intended for power supply of glow discharge and DC deposition of organosilicon compounds (OSC) with output voltages up to 5kV and load currents up to 2A. The equipment can be used either with external ballast or without it.

Model:

Max. Output parameters

Case type:

Note:

Download

Voltage, V

Current, A

Glow discharge:

"ELG-1,3/3000 (-R)"

-3000

1,5

19", 4HU

4 kW, integrated ballast

.PDF

"ELG-4/4000 (-R)"

-4000

4

2*19", 4HU

16 kW, ext. ballast

Power supply inverters for glow dischargePower supply inverters for glow discharge

Power supply inverters for organosilicon deposition (pseudo sine wave generators)

ELF series.

ELF series equipment is intended to supply power for OSC plasma deposition with output voltage (40 kHz AC) up to 2.5 kV and capacity up to 9 kW. They are represented as monoblocks and 2 block kits. Unlike DC units, ELF series equipment ensures sustained processes without ballasts at the output.

The devices are uncritical to the possible asymmetry of the current load.

Outputs are electrically separated from the case.

Note: Usage of "ELF-4/2500" in one of "Ferry Vatt" installations for application an anti-reflective OSC coating on titanium oxynitride surface of thermal storage panels allowed to obtain at least 97% degree of external radiation absorption (according to IR). 

Model:

Max. Output parameters

Case type:

Note:

Download

Voltage, V

Current, A

OSC deposition ("pseudo sine wave" generators)

"ELF-2/3000(-R)"

~2500

1,5

 19", 4HU

4 kW, 4 output voltages,
40 kHz, external composing ballast

.PDF

"ELB-20/500 (-R)"+
"ELF-4/2500"

~2500

4,0

19", 4HU+
19", 4HU

9 kW, 2-block kit, 40kHz

Power supply inverters for organosilicon deposition (pseudo sine wave generators)Power supply inverters for organosilicon deposition (pseudo sine wave generators)Power supply inverters for organosilicon deposition (pseudo sine wave generators)Power supply inverters for organosilicon deposition (pseudo sine wave generators)Power supply inverters for organosilicon deposition (pseudo sine wave generators)Power supply inverters for organosilicon deposition (pseudo sine wave generators)

The equipment of ELF series provides standalone and remote control modes, high accuracy control (± 1%) and current value indexing of any output parameter - current, voltage or capacity. It has optimized static volt-ampere characteristics of output and supports volt-ampere characteristics change according to customer's requirements. ELF series equipment prevents operation in the critical points of their volt-ampere characteristics and ensures diagnostic of external power source, self-diagnostics and alarm signals. The inverters dimension type 19" allow for additional (on Customer's demand) options integration (cathode-compensators supply unit etc) with current values indexing of any option output parameters (up to 3) in the "capacity-options" display.

Microarc dynamic protection. RS-485 (-R) analog-digital or network remote control interface. Available in 2 standard sizes:

  • low-capacity (up to 1.5kW), hermetic, in plastic cases, water-cooled, remote control, intended for installation on a vertical assembling panel;
  • medium-power (up to 9kW), 4HU, 19" units, air-cooled.
News
01.04.2010
ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.


all news

OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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4, Building 5, Lane 4922, Moscow, Zelenograd,
" "ELMA" building, 124460
Tel / Fax: +7 (495) 988-8394, e-mail: info@esto-el.ru
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