4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460, Russia

Tel/Fax: +7 (495) 988-8394

E-mail: info@esto-el.ru

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Power supply inverters for glow discharge

ELG series.

ELG series equipment is intended for power supply of glow discharge and DC deposition of organosilicon compounds (OSC) with output voltages up to 5kV and load currents up to 2A. The equipment can be used either with external ballast or without it.


Max. Output parameters

Case type:



Voltage, V

Current, A

Glow discharge:

"ELG-1,3/3000 (-R)"



19", 4HU

4 kW, integrated ballast


"ELG-4/4000 (-R)"



2*19", 4HU

16 kW, ext. ballast


The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.

all news

OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460
Tel / Fax: +7 (495) 988-8394, e-mail: info@esto-el.ru
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