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www.esto-el.ru / Catalog / Power supply inverters for ion sources, glow discharge, organosilicon deposition / Power supply inverters for organosilicon deposition (pseudo sine wave generators)

Power supply inverters for organosilicon deposition (pseudo sine wave generators)

ELF series.

ELF series equipment is intended to supply power for OSC plasma deposition with output voltage (40 kHz AC) up to 2.5 kV and capacity up to 9 kW. They are represented as monoblocks and 2 block kits. Unlike DC units, ELF series equipment ensures sustained processes without ballasts at the output.

The devices are uncritical to the possible asymmetry of the current load.

Outputs are electrically separated from the case.

Note: Usage of "ELF-4/2500" in one of "Ferry Vatt" installations for application an anti-reflective OSC coating on titanium oxynitride surface of thermal storage panels allowed to obtain at least 97% degree of external radiation absorption (according to IR). 

Model:

Max. Output parameters

Case type:

Note:

Download

Voltage, V

Current, A

OSC deposition ("pseudo sine wave" generators)

"ELF-2/3000(-R)"

~2500

1,5

 19", 4HU

4 kW, 4 output voltages,
40 kHz, external composing ballast

.PDF

"ELB-20/500 (-R)"+
"ELF-4/2500"

~2500

4,0

19", 4HU+
19", 4HU

9 kW, 2-block kit, 40kHz

News
01.04.2010
ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.


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OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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