4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460, Russia

Tel/Fax: +7 (495) 988-8394

E-mail: info@esto-el.ru

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Power supply inverters for ion sources

ELI series. 

This series is designed to supply electric power to ion sources, which are used for ion-plasma deposition and etching of thin film coatings in vacuum, for ion surface cleaning of products and for ion assisting. The units with output voltage up to 300V and capacity up to 4kW are intended for low-voltage ion sources of "End Hall" type. The units with output voltage up to 4kV and capacity up to 9kW are intended for high-voltage round and for extended ion sources of "Radical" type.

Model

Max. Output parameters

Case type:

Note:

Download

Voltage, V

Current, A

"End Hall" type:

"ELI-18/200 (-R)"

+/- 200(550)

20

19", 4HU

4 kW, neutr. (+backup) 25V, 30A, Iem/Idischarge, double-channel gas puffing control subsystem

.PDF

Universal Automated Signalization type (extended):

"ELI-0,4(0,6)/
3000(N)(-R)"

+3000

0,4(0,6)

19", 4HU

1.2 (1.8) kW, возм.ступ. volt-ampere characteristic, options:
ИП neutr., (+backup), 30V, 32A, Iэм/Iразр, double-channel gas puffing control subsystem

.PDF

"ELI-1,3/3000 (-R)"

+3000

1,5

19", 4HU

4 kW, возм. 2-stage. volt-ampere characteristic, options

"ELI-2/3000 (-R)"

+3000

2,0

19", 4HU

6 kW, возм. 2-stage. volt-ampere characteristic, options

"ELI-3/3000 (-R)"

+3000

3,0

19", 4HU

9 kW, возм. 2-stage. volt-ampere characteristic, options

News
01.04.2010
ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.


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OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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