4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460, Russia

Tel/Fax: +7 (495) 988-8394

E-mail: info@esto-el.ru

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Catalog

Power supply inverters for ion sources, glow discharge, organosilicon deposition

(DC and AC "pseudo sine wave" generators)

Inverters and supply kits for unipolar magnetron sputtering systems

(with integrated and remote frequency switches)

Inverters and supply kits for dual magnetron sputtering systems

(with integrated and remote frequency switches)

Inverters and supply kits for electric potential bias

(with integrated and remote frequency/arc-protection switches)

Power supply inverters for arc evaporators

(with an integrated ignition, switchboard...)

  • provide standalone and remote control modes (both for an arc inverter and for a switchboard).
  • ensures diagnostic of external power source, self-diagnostics and alarm signals.
  • have analog-digital or network (RS-485) remote control interfaces.
Miscellaneous

Part of the comprising products is represented by commercially-supplied goods. The other part - "pilot" products - is represented by unique devices, which to date are passing in-process testing in their Customers' facilities.

News
01.04.2010
ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.


all news

OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460
Tel / Fax: +7 (495) 988-8394, e-mail: info@esto-el.ru
www.esto-el.ru
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